HENGKO Surface Mount Filters are designed to meet the demanding requirements of integrated gas systems used in semiconductor OEM tools. Offering industry-leading filtration at 0.003 µm, these filters ensure exceptional performance and reliability with a particle interception efficiency of ≥99.9999999% (9-LRV) at 120 slpm.
Constructed from robust 316L stainless steel powder sintered for the filter element and housing, these filters are compliant with SEMI F86-0304 specifications, featuring two-port components tailored for 1.125” gas distribution systems with a C-seal configuration. They support maximum inlet pressure of 3.4 MPa at 100°C and a maximum operating pressure differential of 0.69 MPa at 100°C.
These specialized filters, compatible with both C-type and W-type seal specifications, achieve downstream cleanliness with particle release of
With a surface finish of Ra < 1.6 µm on the exterior and Ra < 0.13 µm on the interior, they are designed to withstand high temperatures up to 460°C. Engineered for easy integration and modular design upgrades, these filters simplify installation and maintenance, helping to optimize system performance in semiconductor gas delivery and control applications.
▶ Overall 316L stainless steel construction
▶ Miniaturized design, compact structure, space-saving
▶ Excellent gas replacement and desorption characteristics
▶ High temperature, high pressure, and corrosion resistant
▶ Electro-polished 316L stainless steel housing
▶ Easy and efficient installation and maintenance
▶ Mechanical sealing, structurally non-welded to the medium
| Technical Parameters | Values |
|---|---|
| Filter Element Material | 316L Stainless Steel Sintered Powder |
| Housing Material | 316L Stainless Steel |
| Maximum Inlet Pressure | 3.4 MPa @ 100°C |
| Maximum Operating Differential | 0.69 MPa @ 100°C |
| Helium Verification Leak Rate | 1x10⁻¹¹ cc/min |
| Helium Test Leak Rate | 1x10⁻⁹ cc/min |
| Surface Treatment | Outer Surface Ra < 1.6 μm |
| Inner Surface Ra < 0.13 μm | |
| Maximum Operating Temperature | 460°C |
| Particle Interception Efficiency | ≥99.9999999% (9-LRV) @ 120 slpm (Reference MPPS, all particles) |
| Downstream Cleanliness | Particle Release: < 0.03 particles/liter (< 1 particle/ft³) |
| Volatiles: < 10 ppb moisture | |
| Particle Interception Size | ≥0.003 μm |
| Flow Range | 0 ~ 120 slpm |
Here’s the part number you can order and size details :
| Product Model | Flow Rate | Height H (mm) | Filtration Precision | Cleaning Level |
|---|---|---|---|---|
| Z01B-00637 | 10 slpm | 51.6 | 0.003 μm | C |
| Z01B-00638 | 40 slpm | 82.9 | 0.003 μm | C |
| Z01B-00687 | 80 slpm | 126.2 | 0.003 μm | C |
| Z01B-00688 | 120 slpm | 167.9 | 0.003 μm | C |
For use with W-seal and C-seal, 1.125” and 1.5” surface mount modular gas delivery systems.