Process Gas Specialty Filter, also known as Point-to-Use Inline Filter, is specifically designed for the semiconductor industry to
precisely remove micro-particles from UHP (Ultra-High Purity) gas streams, ensuring production purity.
Its installation is simple, requiring only the connection to the gas pipeline and tightening of the nuts, avoiding welding risks and ensuring a reliable seal.
Made entirely of premium 316L stainless steel, it features a compact and lightweight design that significantly reduces pressure loss while delivering
exceptional particle filtration efficiency. This makes it the ideal choice for purifying process gases.
HENGKO supplies professional OEM Point-to-Use Inline Gas Filters, tailored to meet the stringent demands of
high-performance industrial applications.
▶ 100% 316L Stainless Steel Construction
Ensures durability, high resistance to corrosion, and compatibility with demanding industrial environments.
▶ High Temperature, High Pressure, and Corrosion Resistance
Ideal for use in extreme conditions, providing reliable performance under high temperatures and pressures.
▶ 100% Ammonia Leak Testing
Each unit undergoes rigorous ammonia leak testing to guarantee safe and reliable sealing performance.
▶ High Flow Rate with Low Resistance
Designed for efficient gas flow, reducing pressure loss and maintaining optimal system performance.
▶ Suitable for Various Process Gases
Versatile design supports a wide range of industrial gases, making it suitable for multiple applications.
▶ Ultra-High Particle Capture Rate
Ensures superior filtration performance, effectively capturing even the smallest particles for maximum purity.
▶ 100% Integrity Testing
Every filter is thoroughly tested to ensure structural and operational integrity, meeting the highest quality standards.
▶ Ideal for Cleanroom Environments
Specially designed for use in cleanroom conditions, ensuring cleanliness during manufacturing, testing, and packaging processes.
| Technical Parameters | Value/Description |
|---|---|
| Filter Material | 316L Stainless Steel Powder Sintered |
| Housing Material | 316L Stainless Steel |
| Helium Leak Validation Rate | 2x10⁻¹⁰ cc/min |
| Helium Test Leak Rate | 1x10⁻¹⁰ cc/min |
| Surface Treatment | Outer Surface: Ra＜1.6μm |
| Inner Surface: Ra＜0.2μm | |
| Maximum Operating Temperature | Inert Gas: 400-500℃ |
| Corrosive and Reactive Gases: 50℃ | |
| Particle Interception Efficiency | ≥99.9999999% (9LRV) @30 slpm |
| Downstream Cleanliness | ≤0.03 particles/liter @＞0.01μm, 30 slpm |
| Particle Interception Size | ≥0.003μm |
Size of Inline Point to Use T-type Gas Filters
| Product Model | Connection Type and Size | Filter Area Specification | A | B | C | D | E | F |
|---|---|---|---|---|---|---|---|---|
| Z01B-00664 | 1/8 in. Double Ferrule | 2 | 57.7 | 9.7 | 37.8 | 25.4 | 25.4 | 25.4 |
| Z01B-00614 | 1/4 in. Double Ferrule | 4 | 62.7 | 9.7 | 37.8 | 25.4 | 25.4 | 25.4 |
| Z01B-00665 | 3/8 in. Double Ferrule | 8 | 72.1 | 11.7 | 44.2 | 28.7 | 28.7 | 28.6 |
| Z01B-00666 | 1/2 in. Double Ferrule | 8 | 77.2 | 11.7 | 44.2 | 28.7 | 28.7 | 28.6 |
| Z01B-00667 | 6 mm Double Ferrule | 4 | 62.5 | 9.7 | 37.8 | 25.4 | 25.4 | 25.4 |
| Z01B-00668 | 8 mm Double Ferrule | 8 | 72.1 | 11.7 | 44.2 | 28.7 | 28.7 | 28.6 |
| Z01B-00669 | 10 mm Double Ferrule | 8 | 72.6 | 11.7 | 44.2 | 28.7 | 28.7 | 28.6 |
| Z01B-00670 | 12 mm Double Ferrule | 8 | 77.2 | 11.7 | 44.2 | 28.7 | 28.7 | 28.6 |
| Z01B-00671 | 1/4 in. Tube Socket Weld | 4 | 42.7 | 9.7 | 37.8 | 25.4 | 25.4 | 25.4 |
| Z01B-00672 | 3/8 in. Tube Socket Weld | 4 | 42.7 | 9.7 | 37.8 | 25.4 | 25.4 | 25.4 |
| Z01B-00673 | 1/4 in. Tube Butt Weld | 4 | 42.7 | 9.7 | 37.8 | 25.4 | 25.4 | 25.4 |
| Z01B-00674 | 3/8 in. Tube Butt Weld | 4 | 42.7 | 9.7 | 37.8 | 25.4 | 25.4 | 25.4 |
| Z01B-00675 | 1/8 in. NPT Female | 2 | 50.8 | 9.7 | 37.8 | 25.4 | 25.4 | 25.4 |
| Z01B-00676 | 1/4 in. NPT Female | 4 | 54.1 | 9.7 | 37.8 | 25.4 | 25.4 | 25.4 |
| Z01B-00677 | 1/4 in. NPT Male | 4 | 54.1 | 9.7 | 37.8 | 25.4 | 25.4 | 25.4 |
| Z01B-00678 | 3/8 in. NPT Male | 8 | 60.5 | 11.7 | 44.2 | 28.7 | 28.7 | 28.6 |
| Z01B-00679 | 1/2 in. NPT Male | 8 | 69.9 | 11.7 | 44.2 | 28.7 | 28.7 | 28.6 |
| Z01B-00680 | 1/4 in. VCR Male | 4 | 58.4 | 9.7 | 37.8 | 25.4 | 25.4 | 25.4 |
| Z01B-00681 | 1/2 in. VCR Male | 8 | 64.8 | 11.7 | 44.2 | 28.7 | 28.7 | 28.6 |
For use with W-seal and C-seal, 1.125” and 1.5” surface mount modular gas delivery systems.
Some common applications for T-type gas filters:
1.Semiconductor Manufacturing
Removal of particulates from process gases to ensure clean operations in etching, deposition, and lithography processes.
2.Pharmaceutical Production
Filtration of gases in cleanrooms to maintain sterility and prevent contamination in sensitive environments.
3.Food and Beverage Industry
Purification of CO₂ and other gases used in carbonation, packaging, and preservation to prevent contamination.
4.Petrochemical and Chemical Processing
Ensuring clean gas streams for reactions, reducing catalyst contamination, and protecting downstream equipment.
5.Industrial Gas Supply Systems
Filtering industrial gases like nitrogen, oxygen, and argon to maintain gas purity for various manufacturing processes.
6.Laboratories and Research Facilities
Removing contaminants from gas lines to protect sensitive analytical instruments, such as gas chromatographs.
7.Aerospace and Defense
Purifying gases used in critical applications like rocket propulsion and pressurization systems.
8.Power Generation
Filtering gases in fuel cells, turbines, and other systems where gas purity is crucial for optimal performance and efficiency.
9.Water Treatment Plants
Filtration of gases used in aeration and ozonation to improve water quality and prevent clogging in gas distribution lines.
10.HVAC Systems for Cleanrooms and Controlled Environments
Maintaining clean gas flows for air conditioning and ventilation systems in controlled environments like medical and biotech facilities.