Custom IGS Surface Mount C Seal Filters for Advanced Gas Delivery Systems in Semiconductors

Description

HENGKO Surface Mount Filters are designed to meet the demanding requirements of integrated gas systems used in semiconductor OEM tools. Offering industry-leading filtration at 0.003 µm, these filters ensure exceptional performance and reliability with a particle interception efficiency of ≥99.9999999% (9-LRV) at 120 slpm.

Constructed from robust 316L stainless steel powder sintered for the filter element and housing, these filters are compliant with SEMI F86-0304 specifications, featuring two-port components tailored for 1.125” gas distribution systems with a C-seal configuration. They support maximum inlet pressure of 3.4 MPa at 100°C and a maximum operating pressure differential of 0.69 MPa at 100°C.

These specialized filters, compatible with both C-type and W-type seal specifications, achieve downstream cleanliness with particle release of

With a surface finish of Ra < 1.6 µm on the exterior and Ra < 0.13 µm on the interior, they are designed to withstand high temperatures up to 460°C. Engineered for easy integration and modular design upgrades, these filters simplify installation and maintenance, helping to optimize system performance in semiconductor gas delivery and control applications.

 

Product Feature

▶ Overall 316L stainless steel construction
▶ Miniaturized design, compact structure, space-saving
▶ Excellent gas replacement and desorption characteristics
▶ High temperature, high pressure, and corrosion resistant
▶ Electro-polished 316L stainless steel housing
▶ Easy and efficient installation and maintenance
▶ Mechanical sealing, structurally non-welded to the medium

 

 

Datasheet

Technical Parameters Values
Filter Element Material 316L Stainless Steel Sintered Powder
Housing Material 316L Stainless Steel
Maximum Inlet Pressure 3.4 MPa @ 100°C
Maximum Operating Differential 0.69 MPa @ 100°C
Helium Verification Leak Rate 1x10⁻¹¹ cc/min
Helium Test Leak Rate 1x10⁻⁹ cc/min
Surface Treatment Outer Surface Ra < 1.6 μm
  Inner Surface Ra < 0.13 μm
Maximum Operating Temperature 460°C
Particle Interception Efficiency ≥99.9999999% (9-LRV) @ 120 slpm (Reference MPPS, all particles)
Downstream Cleanliness Particle Release: < 0.03 particles/liter (< 1 particle/ft³)
  Volatiles: < 10 ppb moisture
Particle Interception Size ≥0.003 μm
Flow Range 0 ~ 120 slpm

 

Size

Here’s the part number you can order and size details :

Product Model Flow Rate Height H (mm) Filtration Precision Cleaning Level
Z01B-00637 10 slpm 51.6 0.003 μm C
Z01B-00638 40 slpm 82.9 0.003 μm C
Z01B-00687 80 slpm 126.2 0.003 μm C
Z01B-00688 120 slpm 167.9 0.003 μm C

 

Typical Applications

For use with W-seal and C-seal, 1.125” and 1.5” surface mount modular gas delivery systems.

 

 

 

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