High-precision, high-flow, all-metal filtration engineered specifically for Integrated High Purity Gas System assemblies.
Pretreatment
The filter cartridge and its parts are manufactured and packaged in a clean room environment. Attached to the cartridge are particles and water < 10 ppb.
it can be used quickly for filtration
Electronic Grade Cage TreatmentInternal Electro-polish with an internal surface of Ra<0.3um
Fine Filtration
Removal ratings of 0.2μm which are necessary for fine gas filtration
100% Helium Leak Test
100% tested using the helium leak test to ensure quality.
The high particle removal efficiency
■ Exceptionally low particle shedding
■ Superior moisture dry-down characteristics
■ Extremely low outgassing
■ Outstanding chemical compatibility
■ High differential pressure rating
■ Inline, all-welded construction
■ Maximum flow rates: 30, 225, 600, 900, and 2700 std L/min
■ End connections: 1/4, 1/2, and 3/4 in. integral male VCR face seal fittings; 1/4 in. female VCR face seal fittings
■ Industry-standard lengths; see Ordering Information and Dimensions
APPLICATIONS:
Semiconductor process equipment
Weld gas/purge gas
Glove box purge gas
Annealing cover gas
Additive manufacturing
Pharmaceutical production
Solar and energy
Other emerging technologies
Can't find a product that meets your needs? Contact our sales staff for OEM/ODM customization services!