HENGKO Porous Metal Diffusers quickly vent vacuum chambers to the atmosphere which decreases cycle time and increases throughput. Our stainless steel diffusers provide uniform and laminar gas flows without disturbing particles in the chamber. These porous metal diffusers also remove particles greater than 0.1 µm from incoming gas, minimizing defects on the wafer.
Stainless steel diffusers can withstand higher operating pressures and maintain product integrity – the longest lifetime in the industry. And, for corrosion resistance that is superior to nickel, use HENGKO High Purity Diffusers.
Applications
HENGKO Porous Metal Diffusers are used in vent applications on load lock chambers, transfer chambers, cooling chambers, and process chambers of Semiconductor equipment interfaces (CVD, PVD, Etch, Epi) or other vacuum chambers
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